Over four million euros for a total of six application-oriented technical-scientific research projects.
Thanks to financial support from the Dutch Research Council (NWO), two TU/e research projects, led by Professor Martijn van Beurden from the Electrical Engineering department and Associate Professor Hans van Dommelen from the Mechanical Engineering department, can begin. Their work will delve into the development of soft X-ray wafer metrology (Rapid SXR metrology) and liquid metal heat shields for nuclear fusion applications.
In total, six research projects are receiving funding through the Open Technology Program from NWO's Applied and Engineering Sciences domain. NWO is contributing over 4 million euros to these application-oriented technical-scientific research projects, with businesses and other organizations adding over 350,000 euros.
Next generation logic and memory devices
Martijn van Beurden's research focuses on 'Robust and Parametrized Inversion and Detection for Soft X-ray Wafer Metrology (Rapid SXR Metrology).' Soft X-ray metrology is a promising technology for large-scale production of the next generation of logic and memory devices. This technology shows great potential in reconstructing geometries with sub-nanometer precision due to the short wavelength of the X-rays.
However, it also presents new challenges because of the low contrast of materials, the limited brightness of sources, and the need to illuminate large volumes. These issues lead to computational challenges for the underlying reconstruction algorithms and the Maxwell solver, such as low signal-to-noise ratios and large computational domains, which this project aims to address. The performance of the developed algorithms will ultimately be demonstrated using experimental soft X-ray measurement data.
Heat load on a nuclear reactor wall
A completely different research field is nuclear fusion as a cost-effective and reliable energy source, where Hans van Dommelen aims to make a significant contribution. His research, 'Development of additively manufactured tungsten heat shields for nuclear fusion,' focuses on how to reduce the heat load on the reactor wall and ensure its durability. Co-applicants include Professor and colleague Marc Geers and TU/e spin-off Differ.
One potential solution involves liquid metal heat shields, which require tungsten components with complex geometric structures. These could be manufactured using a 3D-printing process. This project aims to gain a fundamental understanding of the material's evolution during processing, to develop and optimize the additive manufacturing process for tungsten, and to demonstrate its potential for producing liquid metal heat shields.
Open Technology Program
The Open Technology Program provides funding for application-oriented technical-scientific research that is unrestricted and not confined by disciplinary boundaries. The program offers businesses and other organizations an accessible way to connect with scientific research that is expected to lead to societal and/or scientific impact.
